Studies on subsurface damage detection and wetetching process of K9 optics

chen ning; zhang qing-hua; xu qiao; wang shi-jian; duan li-hua

Volume 17 Issue 09

Sep. 2005

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Article Navigation > High Power Laser and Particle Beams > 2005 > 17(09): 0-

zhang peng, yuan sheng-fu, wang hong-yan, et al. Fixed angle plane reflective mirrors scanning measurements for laser small signal gain[J]. High Power Laser and Particle Beams, 2005, 17.

Citation:

chen ning, zhang qing-hua, xu qiao, et al. Studies on subsurface damage detection and wetetching process of K9 optics[J]. High Power Laser and Particle Beams, 2005, 17.

zhang peng, yuan sheng-fu, wang hong-yan, et al. Fixed angle plane reflective mirrors scanning measurements for laser small signal gain[J]. High Power Laser and Particle Beams, 2005, 17.

Citation:

chen ning, zhang qing-hua, xu qiao, et al. Studies on subsurface damage detection and wetetching process of K9 optics[J]. High Power Laser and Particle Beams, 2005, 17.

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Studies on subsurface damage detection and wetetching process of K9 optics

1.
Chengdu Fine Optical Engineering Research Center,P.O.Box 450,Chengdu 610041,China;
2.
Department of Mathematics and Physics,Chongqing University,Chongqing 400044,China

Publish Date: 2005-09-15

Abstract

Abstract

Effects of wet-etching with four kinds of etching solution on the surface of K9 optical components were examined. By investigating the change pattern of wet-etching rate at different depth and surface parameters before and after corrosion, the depth of polishing redeposition layer was estimated. When etched to the depth of 600 nm, the loose polishing redeposition layer and the subsurface damage of the optics were mostly removed, hence the laser damage threshold was improved. However,with 1 500 nm in etching depth, the subsurface flaws and cracks appeared which lowered the laser damage threshold of the optics.The result shows that certain solution etches K9 optics with controllable rate and the laser damage threshold of the optics is improved.
- wet-tching,
- subsurface damage,
- laser-induced damaged threshold,
- polishing redeposition layer

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