Effects on the mirror's thermo-deformation and deflection of different supporting way

The heat-deformation P-V value of Si mirror(80 mm×12.5 mm) fixed in radialfixing way analyzed by ANSYS is 0.109 3 μm, with net irradiation heat 100 W in 5 s by a -40 mm and co-axial uniform laser. And 0.138 8 μm by axialfixing way and 0.121 μm in three points supporting respectively. The experimental result to the Si mirror(75 mm×12.5 mm), fixed in radial-fixing way is 0.32 μm with 100 W heat in 5 s by a 17 mm×20 mm and co-axial uniform laser, and 0.63 μm in axial-fixing way. The experimental mirror deflection is 0.63 μrad by radial-fixing way and 0.28 μrad by axial-fixing way. The deflection is the smallest by threecone supporting way．