Property comparison of optical thin films prepared by Ebeam,ion assisted deposition and ion beam sputtering

wang ying jian; li qing guo; fan zheng xiu

Volume 15 Issue 09

Sep. 2012

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Article Navigation > High Power Laser and Particle Beams > 2003 > 15(09): 0-

huang zhihe, hou jing, peng yang, et al. Photonic crystal fiber surface plasmon resonance effect based on supercontinuum source[J]. High Power Laser and Particle Beams, 2011, 23.

Citation:

wang ying jian, li qing guo, fan zheng xiu. Property comparison of optical thin films prepared by Ebeam,ion assisted deposition and ion beam sputtering[J]. High Power Laser and Particle Beams, 2003, 15.

huang zhihe, hou jing, peng yang, et al. Photonic crystal fiber surface plasmon resonance effect based on supercontinuum source[J]. High Power Laser and Particle Beams, 2011, 23.

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Property comparison of optical thin films prepared by Ebeam,ion assisted deposition and ion beam sputtering

1.
Shanghai Institute of Optics and Fine Mechanics,the Chinese Academy of Sciences,P.O.Box 800 211,Shanghai 201800,China

Publish Date: 2003-09-15

Abstract

Abstract

电子束; 离子辅助; 离子束溅射; 薄膜特性 The optical thin films, including single thin films of ZrO2, TiO2, Al2O3 and AR coatings, were respectively prepared by Ebeam, ion assisted deposition and ion beam sputtering. Then these thin films' properties were measured by several methods, such as profilemeter, atomic force microscopy, surface thermal lensing and Xray diffraction. The thin films' refractive index, surface roughness, absorption and microstructure were given and discussed. Finally, the conclusion was drawn: the option of proper technique to fabricate optical thin films is ion assisted deposition.
- ebeam,
- ion assisted deposition,
- ion beam sputtering,
- thin film properties

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