Experimental study on singlet delta oxygen production in slab RF discharges

This paper reported that the peak intensity values of spectra are in direct ratio with corresponding species’ concentration values. Major plasma-kinetic processes and concentration varieties of major species with varied flow conditions and discharge forms were researched. Slab RF discharges with gas flow are possible in two greatly different forms that are α discharge and γ discharge. A discharge gives higher O2(1Δ)production for fewer quenching particles. Lower specific field intensity values which are helpful for the O2(1Δ)production can be achieved by adding helium. The peak O2(1Δ)concentration with oxygen and helium mixture gas flow is more than 2 times as high as pure oxygen discharge. O2(1Δ)loss in afterglow region is lower than 5% in 0.03 s, while stable O2(1Δ)concentration