Experiments have been performed to measure the temperature rise of Ta2O5/SiO2 multilayer coatings with substrate sapphire, fused silica and K9 at repetition rate 10 kHz, 1 064 nm pulse laser. Results calculated by ANSYS agree well with the experiment data.The maximal temperature of films irradiated by the same power density or power but different facula was calculated. The results indicate that, when irradiated by the same power laser, the size of laser facula can affect the temperature rise of films only; the temperature rise of substrate only depends on the laser power. The laser power increases, the temperature rise of substrate increases. However, when films are irradiated by the same power density laser, with the size of laser facula increases, the maximal temperature of films and sub