One-dimension hydrodynamics simulation of an inductively coupled plasma

Based on a one-dimensional hydrodynamics model in which the power deposition is calculated through the kinetics theory, the spatial distributions profile of the plasma density and the electron temperature in the inductively coupled plasma (ICP), were simulated and the influences of the discharge pressure and the coil current on the plasma density and electron temperature were discussed. It has been found that at low pressures, the distributions of the plasma density are basically spatial homogeneity, except near the edge of the discharge equipment. As the pressure increases, the plasma density distribution tends to be evidently spatial inhomogeneous. Both the plasma density and the electron temperature increase as the coil current increases.