Development of X-ray supermirrors used in Kirkpatrick-Baez microscope

gu chun-shi; wang zhan-shan; wang feng-li; zhang zhong; mu bao-zhong; qin shu-ji; chen ling-yan

Volume 18 Issue 07

Jul. 2006

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Article Navigation > High Power Laser and Particle Beams > 2006 > 18(07): 0-

Liu Yifei, Chen Yongguang, Wang Qingguo, et al. Analysis of stirring efficiency in reverberation chamber with combined stirring[J]. High Power Laser and Particle Beams, 2013, 25: 963-967.

Citation:

gu chun-shi, wang zhan-shan, wang feng-li, et al. Development of X-ray supermirrors used in Kirkpatrick-Baez microscope[J]. High Power Laser and Particle Beams, 2006, 18.

Liu Yifei, Chen Yongguang, Wang Qingguo, et al. Analysis of stirring efficiency in reverberation chamber with combined stirring[J]. High Power Laser and Particle Beams, 2013, 25: 963-967.

Citation:

gu chun-shi, wang zhan-shan, wang feng-li, et al. Development of X-ray supermirrors used in Kirkpatrick-Baez microscope[J]. High Power Laser and Particle Beams, 2006, 18.

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Development of X-ray supermirrors used in Kirkpatrick-Baez microscope

1.
Department of Physics,Institute of Precision Optical Engineering,Tongji University,Shanghai 200092,China

Publish Date: 2006-07-15

Abstract

Abstract

Design and fabrication of the X-ray supermirror used as reflective optical element in Kirkpatrick-Baez (KB) microscope were proposed. W/B4C was selected as coating materials pair. Design method and optimization of X-ray supermirrors were discussed. The designed multilayer structure was deposited on the Si wafer substrate using magnetron-sputtering system. The reflectivities of W/B4C supermirrors were measured by X-ray diffraction instrument (8 keV). The reflectivities of supermirrors are 20% at 1.052° and 1.143° designed grazing incident angles. The bandwidth of reflective plateau reaches 0.3°, which can fulfill the requirements of KB microscope.
- multilayer,
- x-ray supermirror,
- kb microscope,
- magnetron-sputtering,
- reflectivity

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