Preparation and XPS study of gradient bromating amorphous hydrogenated carbon film

ma zhao-xia; wu wei-dong; feng jian-hong; cheng xin-lu; tang yong-jian; yang xiang-dong

Volume 19 Issue 01

Jan. 2007

Turn off MathJax

Article Contents

Abstract

References

Article Navigation > High Power Laser and Particle Beams > 2007 > 19(01): 0-

chen ming, yang cun-bang, ding yong-kun, et al. Data acquisition system based on VXI for ICF[J]. High Power Laser and Particle Beams, 2006, 18.

Citation:

ma zhao-xia, wu wei-dong, feng jian-hong, et al. Preparation and XPS study of gradient bromating amorphous hydrogenated carbon film[J]. High Power Laser and Particle Beams, 2007, 19.

chen ming, yang cun-bang, ding yong-kun, et al. Data acquisition system based on VXI for ICF[J]. High Power Laser and Particle Beams, 2006, 18.

Citation:

ma zhao-xia, wu wei-dong, feng jian-hong, et al. Preparation and XPS study of gradient bromating amorphous hydrogenated carbon film[J]. High Power Laser and Particle Beams, 2007, 19.

PDF( 207 KB)

Preparation and XPS study of gradient bromating amorphous hydrogenated carbon film

1.
Research Center of Laser Fusion,CAEP,P.O.Box 919-987,Mianyang 621900,China;
2.
Institute of Atomic and Molecular Physics,Sichuan University,Chengdu 610065,China

Publish Date: 2007-01-15

Abstract

Abstract

The gradient bromating amorphous hydrogenated carbon films were prepared by low-pressure plasma chemical vapor deposition (LPPCVD) method using the mixture of bromoethane and hydrogen as source gas. The relationships of the film deposition rate and the hydrogen, and that of the bromine content and the bromioethane flowrate were described. The influences of the etching time and bromine flowrate on the main bounding state of the film CH C-Csp2 and C-Csp3 were analyzed. The results show that the deposition speed of the thin film decreases linearly with the increment of the hydrogen flowrate. Bromine content increases at first and then reduces with inreasment of the bromoethane flowrate. The longer the etch time and the lower the bromoethane flowrate are, the harder the prapared thin film is.
- low-pressure plasma,
- chemical vapor deposition,
- gradient bromating amorphous hydrogenated carbon film,
- xps spetrum,
- amorphous carbons

FullText(HTML)

References(0)

References

Relative Articles

[1]	zhou yi, he jie, zhang junwei, zhou hai, feng bin, yang shujuan, xie na, lin donghui. Experiment of ambient temperature distribution in ICF driver’s target building[J]. High Power Laser and Particle Beams, 2009, 21(06): 0- .
[2]	yuan yongteng, miao wenyong, ding yongkun, zhao zongqing, hao yidan, cao zhurong. Modulation transfer function measurement in ICF hydrodynamic instability experiments[J]. High Power Laser and Particle Beams, 2009, 21(02): 0- .
[3]	ma xiao-jun, gao dang-zhong, tang yong-jian, yang meng-sheng. Simulation of defects on micro-shells surface affecting power spectrum[J]. High Power Laser and Particle Beams, 2008, 20(09): 0- .
[4]	lin hong-huan, lu zhen-hua, wang jian-jun, chen de-huai, deng qing-hua, li ming-zhong, li xiao-qun. Polarization stabilization of all fiber frontend system for laser facility prototype[J]. High Power Laser and Particle Beams, 2008, 20(09): 0- .
[5]	ni wei-feng, xu jia-yun, chen zhong, li bin, shao xin-sheng. Calibration in measurement of ICF target material areal density using β-ray[J]. High Power Laser and Particle Beams, 2008, 20(01): 0- .
[6]	feng jian-hong, lu tie-cheng, wu wei-dong, huang yong, wei sheng, tang yong-jian. Effecting factors on bounce of inertial confinement fusion microshells[J]. High Power Laser and Particle Beams, 2008, 20(09): 0- .
[7]	huang chang-gang, wang chao-yang, tang yong-jian, wang mei-li, yan hong-mei, guan feng. Preparation and adsorption properties of high density resorcinol-formaldehyde carbonized aerogel ICF target[J]. High Power Laser and Particle Beams, 2007, 19(01): 0- .
[8]	sun li-ning, liu yan-wu, qu dong-sheng, li chang-feng, feng bin, wang li-quan. ICF target positioning robot system[J]. High Power Laser and Particle Beams, 2007, 19(08): 0- .
[9]	ren hong-bo, wan xiao-bo, zhang lin, du ai-ming, xiu peng. Synthesis of nano Au doped SiO2 aerogels by seeding method[J]. High Power Laser and Particle Beams, 2006, 18(05): 0- .
[10]	ren hong-bo, wan xiao-bo, zhang lin, yuan guang-hui, xiu peng, zhang yong. Preparation of modified silica aerogel and its appilication in inertial confinement fusion (ICF) experiment[J]. High Power Laser and Particle Beams, 2006, 18(08): 0- .
[11]	luo jiang-shan, wu wei-dong, tang yong-jian. Preparation and application of beryllium hydride materials in inertial confinement fusion[J]. High Power Laser and Particle Beams, 2006, 18(01): 0- .
[12]	wang jian-jun, li ming-zhong, deng qing-hua, tang jun, luo yi-ming, sui zhan. Polarization control technology of fiber front-end system in ICF driver[J]. High Power Laser and Particle Beams, 2006, 18(05): 0- .
[13]	chen fa-xin, yang jian-lun, wen shu-huai. Numerical simulation for neutron pinhole imaging in ICF[J]. High Power Laser and Particle Beams, 2005, 17(06): 0- .
[14]	deng qing-hua, sui zhan, li ming-zhong, wang jian-jun, luo yi-ming, tang jun. A new homochromous depolarizer applied in ICF[J]. High Power Laser and Particle Beams, 2005, 17(09): 0- .
[15]	chen de wei, li yong ping. Analysis of color separation grating of oblique incident wave[J]. High Power Laser and Particle Beams, 2004, 16(02): 0- .
[16]	zhu qi xiang. Frame structure research and manufacturing of a new type array mirror for ICF drive system[J]. High Power Laser and Particle Beams, 2002, 14(06): 0- .
[17]	wu wei dong, xu hua, wei sheng, tang yong jian, chen zheng hao. Pulse laser vapor deposition technology and its application in fabrication of the ICF filmtargets[J]. High Power Laser and Particle Beams, 2002, 14(06): 0- .
[18]	zhang ji-cheng, tang yong-jian, wu wei-dong, huang yong. Preparation of the Cu2O/C60 gradient film[J]. High Power Laser and Particle Beams, 2001, 13(05): 0- .