Interface roughness of Mo/Si soft X-ray multilayers

qin jun-ling; shao jian-da; yi kui; zhou hong-jun; huo tong-lin; fan zheng-xiu

Volume 19 Issue 05

May 2007

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Article Navigation > High Power Laser and Particle Beams > 2007 > 19(05): 0-

sun hong-bing, pei yuan-ji, jin kai, et al. Calculation of loaded cavity external Q[J]. High Power Laser and Particle Beams, 2006, 18.

Citation:

qin jun-ling, shao jian-da, yi kui, et al. Interface roughness of Mo/Si soft X-ray multilayers[J]. High Power Laser and Particle Beams, 2007, 19.

sun hong-bing, pei yuan-ji, jin kai, et al. Calculation of loaded cavity external Q[J]. High Power Laser and Particle Beams, 2006, 18.

Citation:

qin jun-ling, shao jian-da, yi kui, et al. Interface roughness of Mo/Si soft X-ray multilayers[J]. High Power Laser and Particle Beams, 2007, 19.

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Interface roughness of Mo/Si soft X-ray multilayers

1.
Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,P.O.Box 800-211,Shanghai 201800,China;
2.
Graduate University of Chinese Academy of Sciences,Beijing 100039,China;
3.
National Synchrotron Radiation Laboratory,University of Science and Technology of China,P.O.Box 6022,Hefei 230029,China

Publish Date: 2007-05-15

Abstract

Abstract

A series of Mo/Si multilayers were prepared by magnetron sputtering, with top layers being Mo layer and Si layer respectively. Periodic length of Mo/Si multilayers were determined by small angle X-ray diffraction. As fresh surfaces of Mo/Si multilayers with different period number were approximatively equal to the interface of the same multilayer, interface roughness change law of multilayers as layer number increases was studied by atomic force microscope. Soft X-ray reflectivity of Mo/Si multilayers were measured in National Synchrotron Radiation Laboratory. As the number of layers increases, interface roughness and peak reflectivity of multilayers first increase and then reduce．
- mo/si multilayers,
- soft x-ray,
- interface roughness,
- reflectivity

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