Eliminating of subsurface damage structure

The sub-surface damage(SSD) in optied components formed in the process of whetting and polishing is analyzed. Utilizing the mechanism of wet etching and the Marangoni interface effect, CNC chemical etching technique is used to achieve high precision matching of optics surface and elimilate the SSD at the same time. The charactersitics and positions of SSD are analyzed experimently. SSD elimination method SSD is also presented.