Laser-induced damage threshold of hafnia thin films with chemical method

shen jun; luo ai-yun; wu guang-ming; lin xue-jing; xie zhi-yong; wu xiao-xian; liu chun-ze

Volume 19 Issue 03

Mar. 2007

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Article Navigation > High Power Laser and Particle Beams > 2007 > 19(03): 0-

guo shu-guang, zhang shu-ren, cheng zhong-dao. Experimental study of piezoelectric coefficient of ferroelectric materials[J]. High Power Laser and Particle Beams, 2005, 17.

Citation:

shen jun, luo ai-yun, wu guang-ming, et al. Laser-induced damage threshold of hafnia thin films with chemical method[J]. High Power Laser and Particle Beams, 2007, 19.

guo shu-guang, zhang shu-ren, cheng zhong-dao. Experimental study of piezoelectric coefficient of ferroelectric materials[J]. High Power Laser and Particle Beams, 2005, 17.

Citation:

shen jun, luo ai-yun, wu guang-ming, et al. Laser-induced damage threshold of hafnia thin films with chemical method[J]. High Power Laser and Particle Beams, 2007, 19.

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Laser-induced damage threshold of hafnia thin films with chemical method

1.
Pohl Institute of Solid States Physics,Tongji University,Shanghai 200092,China

Publish Date: 2007-03-15

Abstract

Abstract

HfO2 thin films were prepared with chemical method. The influences of heat treatment, UV irradiation and addition of inorganic Al2O3 on laser-induced damage thresholds (LIDT) of HfO2 thin films were studied. HfO2 thin films were characterized by FTIR and X-ray diffraction. And 1-on-1 laser-induced damage threshold tests on HfO2 thin films and HfO2-Al2O3 composite films were carried out with a Q-switched Nd:YAG high power laser at 1 064 nm with a pulse width of 10 ns. The research results showed that the LIDT of the HfO2 thin films could be improved by heating the thin films at 150 ℃.The LIDT of the thin films heated at 150 ℃ was 42.32 J/cm2, which was 82% higher than that of the as-prepared samples. The addition of inorganic Al2O3 to the HfO2 thin films could also enhance the LIDT of thi
- hfo2 thin films,
- heat treatment,
- uv irradiation,
- hfo2-al2o3 composite films,
- laser-induced damage threshold

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