Sodium stearate film of 0.28~0.40 μm thick was made by vacuum thermal evaporation. Sodium stearate film was investigated by Fourier transform IR spectroscopy. Results indicate that sodium stearate film and sodium stearate have similar properties.Research results also indicate that sodium stearate film was not easy to deliquesce in atmospherical condition, but it deliquesce easily in a solution without water. Self -standing Al filters made by PVD were tested by optical microscopy. Their surfaces have no obvious pinholes. The elements in Al filters were analyzed using Auger Electron Spectroscopy. Results indicate that there is no residua of remover in Al filters.