Based on the function analysis of target positioner for inertial confinement fusion, a kind of ICF target positioning robot system is designed to realize the adjustment and the alignment of a target. The robot system includes a target storage subsystem, a target exchange subsystem, a target transport subsystem and a 6-degree of freedom precision parallel robot subsystem, the structure and principle of every subsystem are dissertated. The system realizes micro scale position by parallel structure which is in the front of the system, and has the advantages of low mass, high stiffness, small cone angle, small volume and high precision. The robot system can position a target into a very small micro scale scope around the center of the target chamber whose diameter is several meters, the precis