Technology of coating TiN film on inner face of stainless steel pipe by sputtering at low temperature

zhang yao-feng; wang yong; wei wei; wang jian-ping; fan le; jiang dao-man; zhu cun-bao; liu zu-ping

Volume 19 Issue 08

Aug. 2007

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Article Navigation > High Power Laser and Particle Beams > 2007 > 19(08): 0-

di ming-wei, liu jie, gu ji-you, et al. Effect of VUV irradiation on thermal properties and optical property of silicone rubber reinforced with MQ resin[J]. High Power Laser and Particle Beams, 2008, 20.

Citation:

zhang yao-feng, wang yong, wei wei, et al. Technology of coating TiN film on inner face of stainless steel pipe by sputtering at low temperature[J]. High Power Laser and Particle Beams, 2007, 19.

Citation:

zhang yao-feng, wang yong, wei wei, et al. Technology of coating TiN film on inner face of stainless steel pipe by sputtering at low temperature[J]. High Power Laser and Particle Beams, 2007, 19.

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Technology of coating TiN film on inner face of stainless steel pipe by sputtering at low temperature

1.
National Synchrotron Radiation Laboratory,University of Science and Technology of China,P.O.Box 6022,Hefei 230029,China

Publish Date: 2007-08-15

Abstract

Abstract

A surface treatment setup of coating TiN film on the inner face of stainless steel pipe vacuum chamber for accelerators at low temperature is described. A series of surface treatment parameters have been achieved through many coating experiments on a stainless steel pipe which is 86 mm in diameter and 2 000 mm in length. The test results show that TiN film of the best quality could be coated on the inner face of stainless steel pipe under 80～90 Pa and 160~180 ℃, and the deposition rate achieves 0.145 nm/s. The secondary electron yield of the coated chamber decreases distinctly compared with that of the uncoated chamber.
- dc sputtering at low temperature,
- tin film,
- stainless steel chamber,
- secondary electron yield,
- accelerator

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