Effects of CO2 laser and vacuum plasma cleanings on  silica-oil-and-grease polluted quartz substrates

li xu-ping; zu xiao-tao; yuan xiao-dong; jiang xiao-dong; zheng wan-guo; tang can; li ke; xiang xia; guo yuan-jun; xu shi-zhen; yuan zhao-lin

Volume 19 Issue 10

Oct. 2007

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Article Navigation > High Power Laser and Particle Beams > 2007 > 19(10): 0-

wang tao, zhao yuan-an, huang jian-bing, et al. Accumulation effect of multi-shot laser-induced damage to optical coatings[J]. High Power Laser and Particle Beams, 2005, 17.

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li xu-ping, zu xiao-tao, yuan xiao-dong, et al. Effects of CO2 laser and vacuum plasma cleanings on silica-oil-and-grease polluted quartz substrates[J]. High Power Laser and Particle Beams, 2007, 19.

wang tao, zhao yuan-an, huang jian-bing, et al. Accumulation effect of multi-shot laser-induced damage to optical coatings[J]. High Power Laser and Particle Beams, 2005, 17.

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Effects of CO2 laser and vacuum plasma cleanings on silica-oil-and-grease polluted quartz substrates

1.
School of Physical Electronics,University of Electronic Science and Technology of China,Chengdu 610054,China;
2.
Research Center of Laser Fusion,CAEP,P.O.Box 919-988,Mianyang 621900,China

Publish Date: 2007-10-15

Abstract

Abstract

As an important window material for the target chamber, the quartz substrate's cleaning is vital for its laser damage threshold. In this work, the quartz substrates polluted by evaporated silica-oil-and-grease were cleaned by CO2 laser and plasma and the damage thresholds were studied. The samples were characterized via the optical microscopy photo, the water contact angle, the optical transmittance and the laser damage threshold. The experimental results showed that the substrates could be well cleaned by low energy CO2 laser combined with vacuum subsequent plasma. After cleaning, the water contact angle of the quartz substrates decreased from 63 to 4, the transmittance increased from 92.3% to 93.0%, and the damage threshold increased from 3.77 J/cm2 to 5.09 J/cm2 when irradiated by 351 n
- quartz substrate,
- silica-oil-and-grease,
- co2 laser cleaning,
- plasma cleaning,
- laser induced damage threshold

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