li bangming, shen jianxin, liao wenhe, et al. Correction performance and control algorithm of micromachined membrane deformable mirror[J]. High Power Laser and Particle Beams, 2010, 22.
Citation: li bangming, shen jianxin, liao wenhe, et al. Correction performance and control algorithm of micromachined membrane deformable mirror[J]. High Power Laser and Particle Beams, 2010, 22.

Correction performance and control algorithm of micromachined membrane deformable mirror

  • Publish Date: 2010-06-30

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    通讯作者: 陈斌, bchen63@163.com
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      沈阳化工大学材料科学与工程学院 沈阳 110142

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