The paper describes optical diagnosis result of 100 μm FEL spontaneous radiation and stimulated radiation experiment based on RF-linac running and briefly introduces 100 μm FEL optic-resonator collimation system. Wavelength spectrum, power energy and pulse structure of radiation signal are measured and diagnosed for requirements of 100 μm FEL experiment research. Ge:Ga photoelectricity detector and FIR-spectrometer measurement system can acquire wavelength spectrum, macro pulse wave of radiation light singal and 115 μm central wavelength of stimulated radiation through analyzing macro pulse of radiation light. Measurement of power and energy of radiation signal with marked Ge:Ga detector acquires mW level power and nJ level energy of marco pulse.