Plasma density measurement of electron cyclotron resonance ion source for neutron generator

It is a traditional method to diagnose electron-cyclotron-resonance (ECR) plasma source, using a single probe to measure the current-voltage curve of the plasma, based on which and theoretic formula the plasma density can be computed. The article adopts a Langmuir probe having a role of emission electrons to measure two different current-voltage curves with and without emission. It is ease to get the plasma potential via the inflexion of the two curves and compute directly various physical quantities by the assistant computor, such as electron temperature, electron/ion density, plasma potential etc. The deviation is about percent 1.8 between the measurement results by traditional and the new method, but the latter has higher efficiency.