Infiltrating between ZrO2 and SiO2 Sol-Gel films

wang bi-yi; zu xiao-tao; zhao song-nan; guo yuan-jun; li xu-ping; xu shi-zhen; lu hai-bing; jiang xiao-dong; yuan xiao-dong; zheng wan-guo

Volume 19 Issue 09

Sep. 2007

Turn off MathJax

Article Contents

Abstract

References

Article Navigation > High Power Laser and Particle Beams > 2007 > 19(09): 0-

cheng bing-xun, wu wei-dong, he zhi-bing, et al. Effects of sputtering power on structure and properties of Ti films deposited by DC magnetron sputtering[J]. High Power Laser and Particle Beams, 2006, 18.

Citation:

wang bi-yi, zu xiao-tao, zhao song-nan, et al. Infiltrating between ZrO2 and SiO2 Sol-Gel films[J]. High Power Laser and Particle Beams, 2007, 19.

Citation:

wang bi-yi, zu xiao-tao, zhao song-nan, et al. Infiltrating between ZrO2 and SiO2 Sol-Gel films[J]. High Power Laser and Particle Beams, 2007, 19.

PDF( 591 KB)

Infiltrating between ZrO2 and SiO2 Sol-Gel films

1.
School of Physics and Electron,University of Electronic Science and Technology of China,Chengdu 610054,China;
2.
Research Center of Laser Fusion,CAEP,P.O.Box 919-987,Mianyang 621900,China

Publish Date: 2007-09-15

Abstract

Abstract

The single-layer SiO2, single-layer ZrO2,two-layer ZrO2/SiO2 and two-layer SiO2/ZrO2 thin films were deposited on K9 glass by Sol-Gel spin-coating method. The colloidal suspension of ZrO2 was prepared using Zr(OPr)4 and colloidal suspension of SiO2 was prepared using TEOS as precursor. The surface morphologies of SiO2 and ZrO2 thin films were observed by AFM. Ellipsometry was used to measure the thickness and refractive index of the films. UV-VIS spectrophotometer was used to measure the transmittance of the films. The results showed that the infiltration of the two-layer SiO2/ZrO2 film was much serious than that of the two-layer ZrO2/SiO2 film, which is very trifling. With the TFCalc thin film design software, the transmittance of the films was simulated with the theoretical three-layer m
- ellipometry,
- thin film design,
- sol-gel,
- infiltrating,
- transmittance

FullText(HTML)

References(0)

References

Relative Articles

[1]	Xu Honglai, Xiang Rujian, Lu Fei, Luo Zhongxiang, Li Guohui. Control method of local cementation stress in phase-corrector[J]. High Power Laser and Particle Beams, 2015, 27(07): 071002. doi: 10.11884/HPLPB201527.071002
[2]	Xu Dechao, Wang Haixia, Zhang Zhong, Zhu Jie, Lian Yuhong, Wang Zhanshan. Stress and thermal properties of Mo/B₄C multilayers in soft X-rays[J]. High Power Laser and Particle Beams, 2015, 27(06): 062001. doi: 10.11884/HPLPB201527.062001
[3]	He Shifeng, Tu Yuchun, Feng Zhixiang, Yue Shuaipeng, Wang Fengli, Zhu Jingtao. Stress analysis of high reflective multilayers fabricated by magnetron sputtering[J]. High Power Laser and Particle Beams, 2014, 26(05): 054002. doi: 10.11884/HPLPB201426.054002
[4]	Li Jingping, Fang Ming, He Hongbo, Shao Jianda, Li Zhaoyang. In situ stress evolution in magnetron-sputtered Si-based thin films[J]. High Power Laser and Particle Beams, 2013, 25(11): 2826-2830. doi: 10.3788/HPLPB20132511.2826
[5]	Wang Ling, Wang Xin, Mu Baozhong, Yi Shengzhen, Zhu Jingtao, Wang Zhanshan. Influence of mounting stress on the surface shape of Schwarzschild objective[J]. High Power Laser and Particle Beams, 2013, 25(10): 2599-2603. doi: 10.3788/HPLPB20132510.2599
[6]	Zhang Ying, Pang Beibei, Xi Zhiguo, Li Jian. Design of a in-situ stress loading system used for residual stress neutron diffractometer[J]. High Power Laser and Particle Beams, 2013, 25(11): 2865-2868. doi: 10.3788/HPLPB20132511.2865
[7]	Cheng Xinbin, Shen Zhengxiang, Jiao Hongfei, Ma Bin, Zhang Jinlong, Ding Tao, Wang Zhanshan. SiO₂/HfO₂高反射膜的研制[J]. High Power Laser and Particle Beams, 2012, 24(06): 1276-1280. doi: 10.3788/HPLPB20122406.1276
[8]	jiang li, wang xiaoqiang, tan moyan, huang qiushi, li haochuan, zhou sika, zhu jingtao, wang zhanshan. Dual-functional multilayer for high-reflectivity at 19.5 nm and low-reflectivity at 30.4 nm[J]. High Power Laser and Particle Beams, 2011, 23(05): 0- .
[9]	liao guo, he zhibing, chen taihong, xu hua, li jun, chen jiajun, tang yongjian. Effects of sputtering power on structure and property of Mo films deposited by DC magnetron sputtering[J]. High Power Laser and Particle Beams, 2011, 23(09): 0- .
[10]	huang qiushi, li haochuan, zhu jingtao, wang xiaoqiang, jiang li, wang zhanshan, tang yongjian. Stress analysis of W, WSi2, Si single layers and W/Si, WSi2/Si ultilayers fabricated by magnetron sputtering[J]. High Power Laser and Particle Beams, 2011, 23(06): 0- .
[11]	pan lei, zhu jingtao, wang xiaoqiang, jiang li, li haochuan, xu jing, zhang zhong, wang zhanshan, chen lingyan. Surface roughness of Ni/Ti multilayers made by magnetron sputtering[J]. High Power Laser and Particle Beams, 2010, 22(06): 0- .
[12]	zhang bo, wang yong, wei wei, fan le, wang jianping, zhang yufang, li weimin. Deposition of TiZrV coatings onto inner wall of stainless steel pipe by DC magnetron sputtering[J]. High Power Laser and Particle Beams, 2010, 22(09): 0- .
[13]	liu guanghui, fang ming, jin yunxia, zhang weili, he hongbo, fan zhengxiu. Sc₂O₃ substitution layer for application in 532 nm high refector films[J]. High Power Laser and Particle Beams, 2009, 21(10): 0- .
[14]	duan ling-long, wu wei-dong, he zhi-bing, xu hua, tang yong-jian, xu jin-cheng. Effects of negative bias on structure and surface topography of Titanium films deposited by DC magnetron sputtering[J]. High Power Laser and Particle Beams, 2008, 20(03): 0- .
[15]	cheng bing-xun, wu wei-dong, he zhi-bing, xu hua, tang yong-jian, lu ti-cheng. Effects of annealing temperature on microstructure and electric properties of Al Films[J]. High Power Laser and Particle Beams, 2008, 20(01): 0- .
[16]	zhang hui-jing, zhang zhong, zhu jing-tao, bai liang, chen rui, huang qiu-shi, liu li-qin, tan mo-yan, wang feng-li, wang zhan-shan, chen ling-yan. Design and fabrication of high reflectivity Mo/B4C multilayer mirrors[J]. High Power Laser and Particle Beams, 2008, 20(01): 0- .
[17]	lin hua-ping, wu wei-dong, he zhi-bing, xu hua, li jun, wang feng, li sheng-yin, zhang bao-ling, song ping, jiang ling, chen jia-jun, tang yong-jian. Effects of thickness on microstructure and properties of Niobium films deposited by DC magnetron sputtering[J]. High Power Laser and Particle Beams, 2008, 20(03): 0- .
[18]	zhang li, wu yong-gang, cao hong, xu yao, jiao hong-fei, chen ling-yan. Preparation and research of freestanding Zr filter for soft X-ray laser[J]. High Power Laser and Particle Beams, 2006, 18(06): 0- .
[19]	tu bo, jiang jian-feng, zhou tang-jian, cui ling-ling, yao zhen-yu. Numerical simulation of medium temperature and stress for high power disk laser[J]. High Power Laser and Particle Beams, 2005, 17(05s): 0- .