Diagnosis of hydrogen plasmas at low temperature and low pressure by spectroscopy and Langmuir probe

zhu yong-hong; wu wei-dong; lu xiao-man; tang yong-jian; sun wei-guo

Volume 20 Issue 04

Apr. 2008

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Article Navigation > High Power Laser and Particle Beams > 2008 > 20(04): 0-

Liu Yifei, Chen Yongguang, Wang Qingguo, et al. Analysis of stirring efficiency in reverberation chamber with combined stirring[J]. High Power Laser and Particle Beams, 2013, 25: 963-967.

Citation:

zhu yong-hong, wu wei-dong, lu xiao-man, et al. Diagnosis of hydrogen plasmas at low temperature and low pressure by spectroscopy and Langmuir probe[J]. High Power Laser and Particle Beams, 2008, 20.

Liu Yifei, Chen Yongguang, Wang Qingguo, et al. Analysis of stirring efficiency in reverberation chamber with combined stirring[J]. High Power Laser and Particle Beams, 2013, 25: 963-967.

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Diagnosis of hydrogen plasmas at low temperature and low pressure by spectroscopy and Langmuir probe

1.
Institute of Atomic and Molecular Physics,Sichuan University,Chengdu 610065,China;
2.
Research Center of Laser Fusion,CAEP,P.O.Box 919-987,Mianyang 621900,China

Publish Date: 2008-04-15

Abstract

Abstract

The emission spectroscopy and I-V characteristics of hydrogen plasmas excited in helicon-wave plasma chemical vapor deposition(HWP-CVD) device have been measured by emission spectroscopy method and Langmuir probe. The density of the excited hydrogen atoms, plasma density and electron energy distribution function(EEDF) were analyzed by corona model and Druyvestey method. The results indicate that the density of the excited hydrogen atoms increases with the increase of input power while decreases with the increase of pressure. The plasma density increase linearly with the increase of input power and reaches 1012 cm-3. The plasma density increases to a peak value and then decreases with the increase of pressure. The electron average energy increases gradually then gets saturated with the inc
- plasma diagnosis,
- hwp-cvd,
- emission spectroscopy,
- langmuir probe,
- corona model,
- druyvestey method

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