Light scattering from diamond-like carbon films by ellipsometry

Ellipsometry of light scattering from optical thin films are investigated based on reflection ellipsometry measurements from optical thin films. The inverse problem of light scattering from optical films is solved with this method. Diamond-like carbon(DLC) films deposited by pulse vacuum arc ion coating technology with different pulse frequency are studied. The effects of correlation and localized defects in films on scattering ellipsometry are emphasized. The results show that correlation become worse and scattering become more obvious as the pulse frequency increases in depositing DLC films.