Three-dimensional numerical simulation of microhollow cathode discharge model

Three-dimensional fluid equations, steady-state differential equation and reasonable boundary conditions of cylindrical hollow cathode are presented, some parameters have been calculated such as particle density distribution, electron energy and the distribution of electric field. Under the pressure of 6 666.1~13 332.2 Pa and the voltage of 150~300 V discharge, it is found that reducing the dimension of the cathode can enhance the negative glow space, and increasing pressure will enhance the electron density. The simulated results show that the discharge parameters are strongly dependent on voltage and pressure of the microhollow cathode.