huang shengling, mu baozhong, yi shengzhen, et al. Aiming of Kirkpatrick-Baez microscope based on auxiliary optical system[J]. High Power Laser and Particle Beams, 2009, 21.
Citation:
huang shengling, mu baozhong, yi shengzhen, et al. Aiming of Kirkpatrick-Baez microscope based on auxiliary optical system[J]. High Power Laser and Particle Beams, 2009, 21.
huang shengling, mu baozhong, yi shengzhen, et al. Aiming of Kirkpatrick-Baez microscope based on auxiliary optical system[J]. High Power Laser and Particle Beams, 2009, 21.
Citation:
huang shengling, mu baozhong, yi shengzhen, et al. Aiming of Kirkpatrick-Baez microscope based on auxiliary optical system[J]. High Power Laser and Particle Beams, 2009, 21.
An auxiliary optical system has been designed, which can provide precise positioning for aiming Kirkpatrick-Baez(KB) microscope object location. An 8 keV X-ray imaging system by KB microscope with periodic multilayer films has been designed. The field of view and depth of field in the resolution of 5 μm are got, and then the corresponding point and depth of field in diagnostic experiments are calculated. Based on the object-image relations and precision of the KB microscope, an auxiliary visible light imaging system is designed and X-ray imaging experiments are performed, which can achieve equivalent aiming between the visible imaging system and the KB microscope. The results show that ±20 μm vertical axis plane and ±300 μm axial accuracy are achieved through the auxiliary optical pat
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