Marx solid-stage modulator cell for International Linear Collider

The Marx solid-state modulator is a Marx-type electrical circuit designed to generate high voltage impulse for klystrons, which uses integrated gate bipolar transistors (IGBT) as switch. Because of the advantages, which are low cost, high availability and small size, the Marx modulator can circumvent the need of the modulator for International Linear Collider(ILC). This article briefly introduces the Marx cell, including the IGBT switch, the energy storage capacitors, HV power supply and the Marx control system. The Marx cell has passed the 12 kV test. It could be helpful for the modular production of the cell and the realization of multi-cells．