Analysis of uncertainty of measured laser-induced damage threshold

The laser-induced damage threshold (LIDT) is regulated by the ISO11254 standard based on the damage frequency method, and its uncertainty information is useful for the researchers. Analysis shows that the origins of the uncertainty, which valves can be solved by statistics and linear fit theory, lie in measurements of the energy and effective area of the laser beam, calculation of the damage probability in a limited fluence range and the linear fit process in the damage frequency scheme. At last, an 1 064 nm HR thin-film sample was tested in this work. The results indicate that the last two origins are the major uncertainty of the LIDT, they are respectively about 4% and 18% while the LIDT is 7.79 J/cm2, and the total relative combined uncertainty of LIDT of the sample reaches 18.72%.