Electrostatically actuated microelectromechanical deformable mirrors

yan jin-liang

Volume 17 Issue 04

Apr. 2005

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wang wen-jun, gao xue-xi, li shu-hong, et al. Influence of temperature on rare earth sandwich double naphthalocyanines Langmuir-Blodgett multilayer films[J]. High Power Laser and Particle Beams, 2005, 17.

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yan jin-liang. Electrostatically actuated microelectromechanical deformable mirrors[J]. High Power Laser and Particle Beams, 2005, 17.

Citation:

yan jin-liang. Electrostatically actuated microelectromechanical deformable mirrors[J]. High Power Laser and Particle Beams, 2005, 17.

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Electrostatically actuated microelectromechanical deformable mirrors

yan jin-liang

1.
Department of Physics,Yantai Normal University,Yantai 264025,China

Publish Date: 2005-04-15

Abstract

Abstract

The mechanics of the mirror was analyzed using the finite element package ANSYS to show the effect of the structural parameters and actuated voltages on the deflection of the actuator. A lumped parameter model was developed for predicting the transient motion of mirrors, taking into account electrostatic and tensile forces and viscous air damping via squeeze film theory. The results show that the elastic membrane thickness, actuator span and gap spacing have a strong effect on the deflection, the actuator undergoes the deflection increasing nonlinearly at voltages below pull-in voltage and snap through instability at voltages above pull-in voltage when subjected to a voltage ramp, the re-set time and repeatability are attractive when the actuated voltage is set to zero.
- adaptive optics,
- deformable mirror,
- microelectromechanical systems,
- membrane,
- electrostatically actuated

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