liu guanghui, xue chunrong, jin yunxia, et al. Characterization of optical and microstructure properties of ultraviolet Sc2O3 thin films and their damage mechanism at high laser power[J]. High Power Laser and Particle Beams, 2010, 22.
Citation:
liu guanghui, xue chunrong, jin yunxia, et al. Characterization of optical and microstructure properties of ultraviolet Sc2O3 thin films and their damage mechanism at high laser power[J]. High Power Laser and Particle Beams, 2010, 22.
liu guanghui, xue chunrong, jin yunxia, et al. Characterization of optical and microstructure properties of ultraviolet Sc2O3 thin films and their damage mechanism at high laser power[J]. High Power Laser and Particle Beams, 2010, 22.
Citation:
liu guanghui, xue chunrong, jin yunxia, et al. Characterization of optical and microstructure properties of ultraviolet Sc2O3 thin films and their damage mechanism at high laser power[J]. High Power Laser and Particle Beams, 2010, 22.
The electron beam evaporation deposition method was employed to prepare scandium oxide(Sc2O3) films with substrate temperatures varying from 50 to 350 ℃. A spectrophotometer, a glancing incidence X-ray diffraction spectrometer and a WYKO optical profilograph were employed to investigate the optical, microstructure properties and surface roughness of the Sc2O3 films. The refractive index and the extinction coefficient were calculated from the transmittance and reflectance spectra with the help of the Essential Macleod. The laser induced damage threshold(LIDT) of the Sc2O3 films was characterized by a pulsed Nd:YAG laser system at 355 nm with a pulse duration of 8 ns. A maximum value of 2.6 J/cm2 was derived, and t
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