Fast correcting technique of polishing surface form by pressure compensation

xie ruiqing; li yaguo; chen xianhua; huang hao; wang jian; xu qiao

Volume 23 Issue 02

Sep. 2012

Turn off MathJax

Article Contents

Abstract

References

Article Navigation > High Power Laser and Particle Beams > 2011 > 23(02): 0-

xie ruiqing, li yaguo, chen xianhua, et al. Fast correcting technique of polishing surface form by pressure compensation[J]. High Power Laser and Particle Beams, 2011, 23.

Citation:

xie ruiqing, li yaguo, chen xianhua, et al. Fast correcting technique of polishing surface form by pressure compensation[J]. High Power Laser and Particle Beams, 2011, 23.

xie ruiqing, li yaguo, chen xianhua, et al. Fast correcting technique of polishing surface form by pressure compensation[J]. High Power Laser and Particle Beams, 2011, 23.

Citation:

xie ruiqing, li yaguo, chen xianhua, et al. Fast correcting technique of polishing surface form by pressure compensation[J]. High Power Laser and Particle Beams, 2011, 23.

PDF( 2042 KB)

Fast correcting technique of polishing surface form by pressure compensation

1.
Chengdu Fine Optical Engineering Research Center,Chengdu 610041,China

Publish Date: 2011-01-25

Abstract

Abstract

A technique based on contact pressure compensation is presented in order to quicken the convergence of surface of large-aperture optical components during the pre-polishing processes. The pad surface is conditioned to a specific shape using an innovative pad conditioning technique, and thus the non-uniform distribution of contact pressure will be engendered at the interface between workpiece and polishing pad. Combining with accurate polishing speed controlling, the uneven pressure distribution will make workpiece’s surface converge to the desired shape more quickly, which was verified by our experiments. The experiments also indicate that conditioning pad surface to convex can avoid excessive removal of workpiece edge region during the early stages of polishing process. Compared to the t
- optical components,
- polishing,
- surface precision,
- pressure distribution,
- polishing pad

FullText(HTML)

References(0)

References

Relative Articles

[1]	Hu Zhengzheng, Ma Liuyang, Hu Hao. A fault diagnosis method for optical elements based on infrared and visible light videos[J]. High Power Laser and Particle Beams, 2023, 35(8): 089002. doi: 10.11884/HPLPB202335.230040
[2]	Zhao Yuanan, Shao Jianda, Liu Xiaofeng, Li Dawei. Tracking and understanding laser damage events in optics[J]. High Power Laser and Particle Beams, 2022, 34(1): 011004. doi: 10.11884/HPLPB202234.210331
[3]	Wang Hongxiang, Zhu Benwen, Chen Xianhua, Hou Jing, Wang Jinghe. Impact of polishing process parameters on the low frequency surface accuracy of fused silica optics[J]. High Power Laser and Particle Beams, 2015, 27(04): 042001. doi: 10.11884/HPLPB201527.042001
[4]	Huang Wanqing, Zhang Ying, Liu Lanqin, Geng Yuanchao, Wang Wenyi. GRMS specification of high power optics with deformable mirror[J]. High Power Laser and Particle Beams, 2015, 27(05): 051001. doi: 10.11884/HPLPB201527.051001
[5]	Ye Hui, Yang Wei, Hu Chenlin, Bi Guo, Peng Yunfeng, Xu Qiao. Subsurface damage of ground optical elements[J]. High Power Laser and Particle Beams, 2014, 26(09): 092010. doi: 10.11884/HPLPB201426.092010
[6]	Yuan Zhigang, Tang Caixue, Chen Xianhua, Hou Jing, Zheng Nan, Deng Wenhui. Magnetorheological finishing removal stability of large aperture aspherical optics[J]. High Power Laser and Particle Beams, 2014, 26(05): 052012. doi: 10.11884/HPLPB201426.052012
[7]	Xie Ruiqing, Liao Defeng, Wang Xiaobo, Yuan Zhigang, Zhong Bo, Chen Xianhua, Wang Jian, Lei Xiangyang, Hou Jing. Fabrication of Nd:YAG crystal slab using composite lap[J]. High Power Laser and Particle Beams, 2014, 26(01): 012007. doi: 10.3788/HPLPB201426.012007
[8]	Huang Wanqing, Zhang Ying, Wang Wenyi, Geng Yuanchao, Liu Lanqin. Evaluating middle-high frequency phase distortion of optics by fractal method[J]. High Power Laser and Particle Beams, 2013, 25(05): 1171-1175. doi: 10.3788/HPLPB20132505.1171
[9]	Zhu Heng, Liu Xialai, Huang Jinyong, Yan Dingyao, Ma Ping. Polishing of large-aperture reflective SiC mirror using computer-controlled optical surfacing[J]. High Power Laser and Particle Beams, 2013, 25(12): 3311-3314. doi: 3311
[10]	Wang Fanjing, Xiao Wen, Pan Feng, Kou Xin, Zhang Jing, Li Jianyi. Digital holographic detection of surface of optic component[J]. High Power Laser and Particle Beams, 2012, 24(01): 79-83.
[11]	yan fengtao, fan bin, hou xi, wu fan. Large-aperture mirror test using sparse sub-aperture sampling[J]. High Power Laser and Particle Beams, 2011, 23(12): 8-9.
[12]	luo lili, he jianguo, wang yajun, zhang yunfei, huang wen, ji fang. Large-scale dwell time algorithm for computer controlled optical surfacing[J]. High Power Laser and Particle Beams, 2011, 23(12): 11-12.
[13]	zheng nan, li haibo, yuan zhigang, zhong bo. Control software development for magnetorheological finishing of large aperture optical elements[J]. High Power Laser and Particle Beams, 2011, 23(02): 0- .
[14]	fang guanming, cao yiping. Optical element defect detection based on improved Stoilov algorithm[J]. High Power Laser and Particle Beams, 2010, 22(01): 0- .
[15]	xu jiancheng, li haibo, fan changjiang, xu qiao, chai liqun. Specification of optical components using Wigner distribution function[J]. High Power Laser and Particle Beams, 2010, 22(11): 0- .
[16]	zhou lidan, su jingqin, liu lanqin, wang wenyi, wang fang, mo lei, li ping, zhang xiaomin. Effects on beam quality of booster stage induced by “defects” on optics[J]. High Power Laser and Particle Beams, 2009, 21(03): 0- .
[17]	lin dong-dong, cao yi-ping, li da-hai. On-line damage detecting system of multiple large-scale optical components at Brewster’s angle[J]. High Power Laser and Particle Beams, 2007, 19(07): 0- .
[18]	xiang zhen, nie chuan-ji, ge jian-hong, hou jing, xu qiao. Eliminating of subsurface damage structure[J]. High Power Laser and Particle Beams, 2007, 19(03): 0- .
[19]	liu lan qin, jing feng, peng zhi tao, zhu qi hua, cheng xiao feng, jiang dong bin, zhang qing quan, liu hong jie. Study of the static wavefront distortion of optics elements in the multipass amplification system[J]. High Power Laser and Particle Beams, 2003, 15(03): 0- .
[20]	guo shao-feng, lu qi-sheng, yang fen, cheng xiang-ai, jiang hou-man. Influence of mechanical boundary on laser induced damage threshold in optical materials[J]. High Power Laser and Particle Beams, 2001, 13(06): 0- .