Stress analysis of W, WSi2, Si single layers and W/Si, WSi2/Si ultilayers fabricated by magnetron sputtering

huang qiushi; li haochuan; zhu jingtao; wang xiaoqiang; jiang li; wang zhanshan; tang yongjian

Volume 23 Issue 06

Jun. 2011

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Article Navigation > High Power Laser and Particle Beams > 2011 > 23(06): 0-

wang wen-dou, xie wei-ping, song sheng-yi, et al. Transverse space-charge flow in four magnetically insulated transmission lines[J]. High Power Laser and Particle Beams, 2006, 18.

Citation:

huang qiushi, li haochuan, zhu jingtao, et al. Stress analysis of W, WSi2, Si single layers and W/Si, WSi2/Si ultilayers fabricated by magnetron sputtering[J]. High Power Laser and Particle Beams, 2011, 23.

wang wen-dou, xie wei-ping, song sheng-yi, et al. Transverse space-charge flow in four magnetically insulated transmission lines[J]. High Power Laser and Particle Beams, 2006, 18.

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Stress analysis of W, WSi2, Si single layers and W/Si, WSi2/Si ultilayers fabricated by magnetron sputtering

1.
Institute of Precision Optical Engineering,Department of Physics,Tongji University,Shanghai 200092,China;.Shanghai Key Laboratory of Special Artificial Microstructure Materials and Technology,Tongji University,Shanghai 200092,China;.Research Center of Laser Fusion,CAEP,P.O.Box 919-987,Mianyang 621900,China

Publish Date: 2011-06-28

Abstract

Abstract

A series of W, WSi2, Si thin films and W/Si, WSi2/Si periodic multilayers were fabricated by using DC magnetron sputtering technology. Surface profiles before and after deposition were measured with a stylus profiler and the stresses were calculated. The results indicate that W thin films show relatively large compressive stress, while W/Si multilayers show tensile stress. Both WSi2 thin films and WSi2/Si periodic multilayers show compressive stress. WSi2/Si periodic multilayers have the most stable stress state with no sharp change, and is a good material combination for X-ray multilayer optics with a large number of bilayers.
- stress,
- deformation,
- multilayer,
- magnetron sputtering,
- x-ray

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