Investigation into ultimate resolution by femtosecond laser two-photon fabrication technique

song yang; dong xianzi; zhao zhensheng; duan xuanming

Volume 23 Issue 07

Sep. 2012

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Article Navigation > High Power Laser and Particle Beams > 2011 > 23(07): 0-

sheng jia-tian, mou wen-yong, li yun-sheng, et al. Influence of non-LTE radiation ablation on imploding neutron yield[J]. High Power Laser and Particle Beams, 2005, 17.

Citation:

song yang, dong xianzi, zhao zhensheng, et al. Investigation into ultimate resolution by femtosecond laser two-photon fabrication technique[J]. High Power Laser and Particle Beams, 2011, 23.

sheng jia-tian, mou wen-yong, li yun-sheng, et al. Influence of non-LTE radiation ablation on imploding neutron yield[J]. High Power Laser and Particle Beams, 2005, 17.

Citation:

song yang, dong xianzi, zhao zhensheng, et al. Investigation into ultimate resolution by femtosecond laser two-photon fabrication technique[J]. High Power Laser and Particle Beams, 2011, 23.

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Investigation into ultimate resolution by femtosecond laser two-photon fabrication technique

1.
Technical Institute of Physics and Chemistry,Chinese Academy of Sciences,Beijing 100190,China;
2.
Graduate University of Chinese Academy of Sciences,Beijing 100190,China

Publish Date: 2011-07-21

Abstract

Abstract

One 3-dimensional piezostage and one rotation stage are used in two-photon fabrication systems for controlling expose time and expose power with precision as high as 0.02 ms and 7 pW respectively. By accurate controlling expose time and laser power near polymerization threshold, 35 nm and 45 nm polymer line on cover glass are obtained respectively, which is only 1/22 and 1/17 of the laser wavelength used for fabrication. These results are the highest linewidth resolution obtained by two photon fabrication on cover glass until now. It is revealed that linewidth resolution can be improved efficiently with ultra-small reduction of the expose time or expose power near polymerization threshold. The further possible improvement for resolution of two-photon process was analyzed in the paper.
- femtosecond laser,
- two-photon fabrication,
- line width resolution,
- polymerization threshold,
- degree of polymerization

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