Design and multi-cell test of Marx solid-state modulator

The Marx solid-state modulator, designed for international linear collider(ILC), is a Marx-type modulator which uses integrated gate bipolar transistors (IGBTs) as switch. This article introduces the design and test of Marx cell, which includes charge and discharge circles, real-time monitor for voltage and current, control system and protective interlocks. It also introduces voltage balance of IGBTs and takes some simulations for that. Components were laid out on the unit bracket of Marx solid-state modulator according to electrical standard. Four Marx cells have passed the multi-cell HV test and output a superimposed voltage of 24 kV. All the components worked well in HV test.