Multi-beam laser interference lithography pattern

zhang wei; liu weiping; gu xiaoyong; tan chunlei; peng changsi

Volume 23 Issue 12

Feb. 2016

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Article Navigation > High Power Laser and Particle Beams > 2011 > 23(12): 1-2

zhang mei, wang kuilu, wei fuli, et al. Time response of large-core step-index fiber transmission system with scintillator illumination[J]. High Power Laser and Particle Beams, 2009, 21.

Citation:

zhang wei, liu weiping, gu xiaoyong, et al. Multi-beam laser interference lithography pattern[J]. High Power Laser and Particle Beams, 2011, 23: 1-2.

zhang mei, wang kuilu, wei fuli, et al. Time response of large-core step-index fiber transmission system with scintillator illumination[J]. High Power Laser and Particle Beams, 2009, 21.

Citation:

zhang wei, liu weiping, gu xiaoyong, et al. Multi-beam laser interference lithography pattern[J]. High Power Laser and Particle Beams, 2011, 23: 1-2.

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Multi-beam laser interference lithography pattern

1.
Institute of Informational Optical Engineering,Soochow University,Suzhou 215006,China;
2.
Opto-electronics Research Centre,Tampere University of Technology,Tampere 33720,Finland

Publish Date: 2011-12-14

Abstract

Abstract

The principle of multi-beam laser interference lithography patterns was studied according to the electromagnetic theory. The factors affecting the patterns were analyzed by comparing numerical simulations with experimental results. It is found that multi-beam laser interference patterns can be considered as superpositions of multiple parallel stripes which are cosine distributed. The?beams’ polarization direction, incident direction and phase difference are important factors influencing the patterns, which affect the parallel stripes’ amplitude, location, period and orientation severely.
- micro-nano structures,
- nanofabrication,
- laser interference lithography,
- laser interference patterns

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