Measurement of super-smooth surface by X-ray scattering

wang yonggang; fu ruimin; meng xiaohui; xu lingdi; jin zhao

Volume 23 Issue 12

Feb. 2016

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Article Navigation > High Power Laser and Particle Beams > 2011 > 23(12): 13-14

du wenbo, xiao hu, wang xiaolin, et al. Narrow-linewidth high power fiber laser with output power of 334 W in all-fiber MOPA format[J]. High Power Laser and Particle Beams, 2011, 23.

Citation:

wang yonggang, fu ruimin, meng xiaohui, et al. Measurement of super-smooth surface by X-ray scattering[J]. High Power Laser and Particle Beams, 2011, 23: 13-14.

du wenbo, xiao hu, wang xiaolin, et al. Narrow-linewidth high power fiber laser with output power of 334 W in all-fiber MOPA format[J]. High Power Laser and Particle Beams, 2011, 23.

Citation:

wang yonggang, fu ruimin, meng xiaohui, et al. Measurement of super-smooth surface by X-ray scattering[J]. High Power Laser and Particle Beams, 2011, 23: 13-14.

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Measurement of super-smooth surface by X-ray scattering

1.
Beijing Institute of Space Mechanics and Electricity,Beijing 100076,China

Publish Date: 2011-12-14

Abstract

Abstract

The paper introduces the principle of measurement of super-smooth surface by grazing incidence X-ray scattering (GXRS) method and the experimental facility based on an improved X-ray diffraction device. The scattering diagrams measured from three wafers with different roughness are treated by the first-order vector perturbation theory (FOPT) and the generalized Harvey-Shack theory, respectively. The results indicate that the calculated power spectrum density (PSD) functions are in a good agreement with the results obtained from atomic force microscope. The effects of the slit width of detector and the divergence of incident X-ray on the measurement are also analyzed. It is concluded that the measurement error decreases exponentially with reducing the slit width and the incident divergence,
- super-smooth surface,
- x-ray scattering method,
- first-order vector perturbation theory,
- power spectrum density 度

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