Digital holographic detection of surface of optic component

Wang Fanjing; Xiao Wen; Pan Feng; Kou Xin; Zhang Jing; Li Jianyi

Volume 24 Issue 01

Jun. 2016

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Article Navigation > High Power Laser and Particle Beams > 2012 > 24(01): 79-83

yuan zheng, chen tao, cao zhurong, et al. Energy dependent sensitivity of Au-coated-microchannel plate detector in X-ray range[J]. High Power Laser and Particle Beams, 2011, 23.

Citation:

Wang Fanjing, Xiao Wen, Pan Feng, et al. Digital holographic detection of surface of optic component[J]. High Power Laser and Particle Beams, 2012, 24: 79-83.

yuan zheng, chen tao, cao zhurong, et al. Energy dependent sensitivity of Au-coated-microchannel plate detector in X-ray range[J]. High Power Laser and Particle Beams, 2011, 23.

Citation:

Wang Fanjing, Xiao Wen, Pan Feng, et al. Digital holographic detection of surface of optic component[J]. High Power Laser and Particle Beams, 2012, 24: 79-83.

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Digital holographic detection of surface of optic component

1.
School of Instrument Science and Opto-Electronics Engineering,Beihang University,Beijing 100191,China

Publish Date: 2012-01-15

Abstract

Abstract

A digital holographic method is proposed to detect the surface quanlity of optic-components with spherical surface. It can obtain the surface curvature radius and defects simultaneously, and uses the least square parameter calculation to avoid the effects of tilt compensation. The defects are extracted by subtracting a simulated spherical surface generated by the calculated parameters from reconstruction data. Validity of the method is demonstrated by experiments. The difference is less than 1.5% between the results of the proposed method and white light interferometer, and less than 1% among the results obtained with different tilt compensation factors.
- digital holography,
- optic component,
- least square method,
- curvature radius,
- surface defects

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