Digital knifeedge testing technology on microoptical surface characterization

zhang yan; zhang rong zhu; dong jun; zhang jun; cai bang wei

Volume 16 Issue 02

Feb. 2004

Turn off MathJax

Article Contents

Abstract

References

Article Navigation > High Power Laser and Particle Beams > 2004 > 16(02): 0-

zhao yong peng, wang qi, liu jin cheng. Theoretic calculation on high energy electron distribution in argon pumped by electron beam[J]. High Power Laser and Particle Beams, 2003, 15.

Citation:

zhang yan, zhang rong zhu, dong jun, et al. Digital knifeedge testing technology on microoptical surface characterization[J]. High Power Laser and Particle Beams, 2004, 16.

zhao yong peng, wang qi, liu jin cheng. Theoretic calculation on high energy electron distribution in argon pumped by electron beam[J]. High Power Laser and Particle Beams, 2003, 15.

Citation:

zhang yan, zhang rong zhu, dong jun, et al. Digital knifeedge testing technology on microoptical surface characterization[J]. High Power Laser and Particle Beams, 2004, 16.

PDF( 186 KB)

Digital knifeedge testing technology on microoptical surface characterization

1.
Opto electronics Science and Technology Department,Sichuan University,Chengdu 610064,China

Publish Date: 2004-02-15

Abstract

Abstract

The evaluation of microarray optical components is a new task in the field of optical test. The improved Foucault knifeedge test technology has many advantages as real time, digital, precision, etc. This paper introduces the principle and the experimental setup of knifeedge digital test of the surface characterization of micromirror array, and describes the key steps in processing the images of the micromirrors recorded by the CCD detector as: (1)precisely determine the knifeedge position correspond to the darkness threshold of every pixel; (2)determine the slope error of the surface area correspond to the given pixels; (3)reconstruct the examined surface. Furthermore, it also presents some elementary experimental results that the surface error is up to nm level.
- micromirror array,
- surface characterization test,
- knifeedge test,
- digital

FullText(HTML)

References(0)

References

Relative Articles

[1]	Kong Long, Liu Qingxiang, Wang Shaomeng, Li Xiangqiang, Lu Hede, Ma Jiehua. Space charge limited current of beam in radial transmission line[J]. High Power Laser and Particle Beams, 2016, 28(03): 033009. doi: 10.11884/HPLPB201628.033009
[2]	Wang Yuan, Jiang Xiaoguo, Yang Guojun, Chen Sifu, Li Jin. Impulsive interference suppression of intense electron beam time-resolved measurement system[J]. High Power Laser and Particle Beams, 2015, 27(11): 115101. doi: 10.11884/HPLPB201527.115101
[3]	Wu Hanyu, Zhang Xinjun, Wang Liangping, Sun Tieping, Luo Weixi, Li Mo, Wu Gang, Zhang Jinhai. Restraint of focus spot drift of electron-beam in bremsstrahlung radiation[J]. High Power Laser and Particle Beams, 2015, 27(07): 075105. doi: 10.11884/HPLPB201527.075105
[4]	Deng Yongfeng, Tan Yonghua, Han Xianwei. Properties of electron beam plasma in near-sound-speed air flow[J]. High Power Laser and Particle Beams, 2014, 26(12): 129004. doi: 10.11884/HPLPB201426.129004
[5]	Zhu Jun, Jiang Xiaoguo, Chen Nan. High intensity electron beam as a tool for warm dense matter studies[J]. High Power Laser and Particle Beams, 2013, 25(01): 99-103. doi: 10.3788/HPLPB20132501.0099
[6]	zhu jun, chen nan, yu haijun, jiang xiaoguo, wang yuan, dai wenhua, gao feng, li jin. Influence of backstreaming ions on high-current relativistic electron beam propagation[J]. High Power Laser and Particle Beams, 2011, 23(10): 0- .
[7]	li yaping, feng shengqin, wu liping, xu jiayun, bai lixin. Calculation of dose distribution in reactor for flue gas desulfurization and denitrification by electron beam irradiation[J]. High Power Laser and Particle Beams, 2010, 22(01): 0- .
[8]	li qin, li hong, chen nan, gao feng, wang yongwei, wang liping. B-dot monitor for intense electron beam measurement[J]. High Power Laser and Particle Beams, 2009, 21(09): 0- .
[9]	li bo, chen sufen, qi xiaobo, zhang zhanwen, liu yiyang. Influence of electron-beam bombardment upon gas-barrier property of hollow glass microspheres[J]. High Power Laser and Particle Beams, 2009, 21(10): 0- .
[10]	xu yong, li ming, jin xiao, li wei-hua, wang yuan, chen tian-cai. Diagnostics for electron-beam microbunch of L-band RF-linac[J]. High Power Laser and Particle Beams, 2007, 19(10): 0- .
[11]	tang ying, yi ai-ping, liu jing-ru, qian hang, huang xin, yu li, su jian-cang, ding zhen-jie, ding yong-zhong, yu jian-guo. Experimental study on generation of large area uniform electron beam[J]. High Power Laser and Particle Beams, 2007, 19(06): 0- .
[12]	liu jing, shu ting, zhang yu-wen. Analysis on the TM modes of axial vircator driven by electron beam[J]. High Power Laser and Particle Beams, 2006, 18(12): 0- .
[13]	zhang yong-hui, chang an-bi, kang qiang, luo min, gong sheng-gang, li ming-jia, li zheng-hong, ma qiao-sheng, xiang fei, zhao dian-lin, gan yan-qing, liu zhong, . Experiment study of long- time and stable operation of repetitive pulsed and intense current electron- beam source[J]. High Power Laser and Particle Beams, 2005, 17(05): 0- .
[14]	yin ming, l feng-jie, zhang qi-wu. Optimum for the parameters of aberration and distortion of narrow e-beam in normal solution[J]. High Power Laser and Particle Beams, 2005, 17(02): 271- .
[15]	zhang yong-hui, chang an-bi, jiang jin-sheng, chen hong-bin, kang qiang. Structure design and characteristic of high-current electron-beam foilless diode[J]. High Power Laser and Particle Beams, 2002, 14(03): 0- .
[17]	chen xi, xie wenkai, liu shenggang. PULSATION OF ELECTRON BEAM IN　PLASMA MICROWAVE　DEVICES[J]. High Power Laser and Particle Beams, 1999, 11(01): 0- .