Measurement and characteristic evaluation of target circumferential topography with AFM

zhao xue-sen; sun tao; gao dang-zhong; tang yong-jian; dong shen

Volume 17 Issue 12

Dec. 2005

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zhao xue-sen, sun tao, gao dang-zhong, et al. Measurement and characteristic evaluation of target circumferential topography with AFM[J]. High Power Laser and Particle Beams, 2005, 17.

Citation:

zhao xue-sen, sun tao, gao dang-zhong, et al. Measurement and characteristic evaluation of target circumferential topography with AFM[J]. High Power Laser and Particle Beams, 2005, 17.

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Measurement and characteristic evaluation of target circumferential topography with AFM

1.
Research Institute of Precision Engineering,Harbin Institute of Technology,Harbin 150001,China;
2.
Research Center of Laser Fusion,CAEP,P.O.Box 919-986,Mianyang 621900,China

Publish Date: 2005-12-15

Abstract

Abstract

A measurement apparatus which composes of a reformed atomic force microscope (AFM), a precision rotating air-bearing and a auxiliary transform rotary is developed. The spindle error is approximately 0.049 μm. This apparatus can measure the inertial confinement fusion(ICF) target's circles in three orthogonal orientations. With the measured data of given targets, the sphericity, surface roughness and power spectrum were analyzed. The results showed that the sphericity was approximately 0.42 μm, and the average surface roughnesses were 105.7, 12.2, 6.2 and 18.25 nm corresponding to the mode number in the range of 2~10, 11~50, 51~100, and 101~1000, respectively. The average one-dimensional spectrum as a function of the mode number was also calculated.
- icf target,
- afm,
- sphericity,
- surface roughness,
- power spectrum,
- precision spindle,
- auxiliary transform rotary

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