Measurement and characteristic evaluation of target circumferential topography with AFM

A measurement apparatus which composes of a reformed atomic force microscope (AFM), a precision rotating air-bearing and a auxiliary transform rotary is developed. The spindle error is approximately 0.049 μm. This apparatus can measure the inertial confinement fusion(ICF) target's circles in three orthogonal orientations. With the measured data of given targets, the sphericity, surface roughness and power spectrum were analyzed. The results showed that the sphericity was approximately 0.42 μm, and the average surface roughnesses were 105.7, 12.2, 6.2 and 18.25 nm corresponding to the mode number in the range of 2~10, 11~50, 51~100, and 101~1000, respectively. The average one-dimensional spectrum as a function of the mode number was also calculated.