Volume 16 Issue 03
Mar.  2004
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liu gui ang, xie er qing, wang tian min. Studies of ultraviolet light irradiation effect on diamondlike carbon(N) films[J]. High Power Laser and Particle Beams, 2004, 16.
Citation: liu gui ang, xie er qing, wang tian min. Studies of ultraviolet light irradiation effect on diamondlike carbon(N) films[J]. High Power Laser and Particle Beams, 2004, 16.

Studies of ultraviolet light irradiation effect on diamondlike carbon(N) films

  • Publish Date: 2004-03-15
  • In the last few years, the study of nitrogen incorporation into diamondlike carbon (DLC)films has received special attention. The DLC films have been deposited on glass substrates using RF plasma deposition method. N ions were introduced by ion implantation, and DLC(N) films were irradiated by ultraviolet light. Using Raman and infrared transimissing spectroscopy, the authors investigated the UV ray irradiation and N ions implantation effect on the structure and properties of DLC(N) films. The study showes that, UV ray and N ions irradiation does intensive damage on SP3C-H bonds, then leads to the increase of SP2C-H bonds and the decrease of resistivity obviously. It is clear that UV ray causes the increase of Si-O-Si and Si-C bonds also, i.e. the structure and properties of DLC films ha
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