Volume 16 Issue 03
Mar.  2004
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zhou bin, qiu heng-shan, liu xiao-lin, et al. Single-step fabrication of diffraction grating on TiO2 photosensitive gels film by direct UV irradiation[J]. High Power Laser and Particle Beams, 2004, 16.
Citation: zhou bin, qiu heng-shan, liu xiao-lin, et al. Single-step fabrication of diffraction grating on TiO2 photosensitive gels film by direct UV irradiation[J]. High Power Laser and Particle Beams, 2004, 16.

Single-step fabrication of diffraction grating on TiO2 photosensitive gels film by direct UV irradiation

  • Publish Date: 2004-03-15
  • TiO2 photosensitive gel films are derived from chemically modified metalalkoxide with benzoylacetone by sol-gel process. The gel films show an absorption band at around 360 nm, characteristic of the remaining chelate rings. The negative tone gel films are irradiated by UV light through a mask with different pattern to prepare grating pattern on gel films. Depending on the exposure time, the gel films are leaching with ethanol and the grating with different structure on TiO2 photosensitive gel films are obtained.
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      沈阳化工大学材料科学与工程学院 沈阳 110142

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