All solid state pulse excitation source for kHz excimer laser

Wang Qingsheng; You Libing; Yu Yinshan; Zhao Jiamin; Fang Xiaodong

Volume 25 Issue 04

Mar. 2013

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Article Navigation > High Power Laser and Particle Beams > 2013 > 25(04): 885-889

yao zhibin, he baoping, zhang fengqi, et al. Development of measurement system for radiation effect on static random access memory based field programmable gate array[J]. High Power Laser and Particle Beams, 2009, 21.

Citation:

Wang Qingsheng, You Libing, Yu Yinshan, et al. All solid state pulse excitation source for kHz excimer laser[J]. High Power Laser and Particle Beams, 2013, 25: 885-889.

Citation:

Wang Qingsheng, You Libing, Yu Yinshan, et al. All solid state pulse excitation source for kHz excimer laser[J]. High Power Laser and Particle Beams, 2013, 25: 885-889.

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All solid state pulse excitation source for kHz excimer laser

1.
Anhui Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Hefei 230031,China

Received Date: 2012-09-19
Rev Recd Date: 2012-11-05
Publish Date: 2013-03-09

Abstract

Abstract

Due to the constraint of thyratron life, thyratron-based excimer lasers are not available in some situation where high repetition rate is desired, such as in the ophthalmic treatment equipment. We designed a solid state pulsed power module (SSPPM) based on two-stage magnetic pulse compression technology, which uses solid-state switches and magnetic pulse compression to generate a high-voltage pulse of 0.1 microseconds. In discharging on the 193 nm ArF excimer laser, the rise time of the obtained excitation pulse is about 90 ns, the discharge voltage is 16.5 kV, the repetition rate is up to 1 kHz, and the overall transfer efficiency of two-stage magnetic pulse compression switches is 59.1%.
- excimer lasers,
- all solid state pulsed power module,
- magnetic switch,
- magnetic pulse compression

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