Frequency conversion of generating 193 nm laser by deep ultraviolet sum-frequency crystal CLBO

The properties of nonlinear frequency conversion in a new deep ultraviolet sum-frequency crystal CLBO were discussed. The data for sum-frequency CLBO crystal generating 193 nm laser of phase-matching angle, effective nonlinear coefficient, walk-off angle and maximum acceptance angle were calculated. According to those data and taking account of lasers commercialization requirements, several phase-matching projects were compared. At last, the phase-matching type of 2 100 nm(o)+213 nm(e)→193 nm(e) was selected. The phase-matching type of 2 100 nm(o)+213 nm(e)→193 nm(e) with large effective nonlinear coefficient of 0.97, small walk-off angle 3.7° and big acceptance angle 1.9×10-6 rad·mm was proved to be the optimum for generating 193 nm laser.