Electro-mechanical coupled analysis of continuous-membrane bulk-micromachined silicon deformable mirror

Based on a continuous-membrane bulk-micromachined silicon deformable mirror, the paper summarizes the manufacture process of the deformable mirror. Electro-mechanical coupled analysis is presented in detail. Starting from the thin film theory, a universal expression which describes the mirror deflection is finally obtained as well. The relationship between mirror structure parameters and the mirror deflection described by the universal expression can be used to assist in designing mirrors for various applications. The results show that when a 1 μm thick mirror with 20 μm actuator gap is required to work with an actuator voltage less than 120 V and a resonant frequency higher than 50 kHz , the deformable mirror radius should be limited between 21 mm and 13.8 mm. The simulation result re