wang yu-lin, ye yu-tang, wu yun-feng, et al. Integration effects of twice irradiations on homogenizing distribution of one-dimentional impurity concentration[J]. High Power Laser and Particle Beams, 2006, 18.
Citation:
wang yu-lin, ye yu-tang, wu yun-feng, et al. Integration effects of twice irradiations on homogenizing distribution of one-dimentional impurity concentration[J]. High Power Laser and Particle Beams, 2006, 18.
wang yu-lin, ye yu-tang, wu yun-feng, et al. Integration effects of twice irradiations on homogenizing distribution of one-dimentional impurity concentration[J]. High Power Laser and Particle Beams, 2006, 18.
Citation:
wang yu-lin, ye yu-tang, wu yun-feng, et al. Integration effects of twice irradiations on homogenizing distribution of one-dimentional impurity concentration[J]. High Power Laser and Particle Beams, 2006, 18.
The temperature distribution in the small diffusion region induced by laser is nonuniform, and the distribution of impurity concentration is nonuniform too. It was proposed to homogenize the distribution of impurity concentration through integration effects of multi laser induced diffusions. In laser induced selective Zn diffusion in InP, a computer controlled system was used to measure and control the temperature of the small exposed region. The distribution of impurity concentration in the overlapped region of twice irradiations was calculated according to the temperature distribution in the heated region. When the distance between the two adjacent laser irradiation position was 20 μm, the homogenization of one dimension by digital simulation was perfect. This work is fundamental for im
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