Kinetic simulation of discharge excited ArF excimer laser and parameter analysis
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摘要: 利用一维流体模型研究了放电泵浦ArF准分子激光动力学过程，得到气体放电过程中放电电路的电流电压波形，得到了电子密度、光子密度、电场的时空分布特性，分析了放电参数对激光输出的影响。结果表明，电路参数、工作气压、氟气比例均对激光输出有显著影响，放电电路中的电感值对输出影响较小，参数范围较广，而电路中较小的峰化电容值有利于获得长脉冲输出，气压太大或太小都会使输出能量降低，同样，氟气比例太大或太小也会使输出能量降低。Abstract: A one-dimensional fluid model is used to investigate the kinetics of discharge excited ArF excimer laser. Voltage-current waveforms of the gas discharge process coupling with the discharge circuit are obtained. Temporal-spatial evolution of electron number density, photon number density and electric field are obtained and influence of discharge parameters on the laser output are analyzed. The results show that circuit parameters, pressure and fluorine gas ratio all have significant influence on laser output. The inductance has a little influence on the output which result in a large parameter set. Low peaking capacitance is beneficial to long pulse and too high or too low pressure and fluorine gas ratio result in small output.
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Key words:
- ArF excimer laser /
- fluid model /
- discharge circuit /
- electron density /
- photon density
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