Design of arbitrary polarity rectangular pulse power supply based on Marx
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摘要: 设计了一种基于Marx电路的方波脉冲电源，该电源采用磁环隔离驱动方案与全桥Marx电路相结合，实现了正极性、负极性和双极性高压方波脉冲的输出，解决了常规脉冲电源只能输出特定极性脉冲的限制。对电路的运行模式经行了理论分析，并搭建了16级实验样机。实验结果表明：在空载条件下，实现了频率1 kHz，幅值10 kV的正极性、负极性及双极性高压方波脉冲输出。其最小脉宽1 µs，极性可调。该脉冲电源结构紧凑，可以实现输出电压、脉宽、脉冲极性可调。最后使用该方波脉冲电源驱动平行板介质阻挡放电反应器。结果表明：该方波脉冲电源可以作为介质阻挡放电驱动源。Abstract: Low temperature plasma produced by dielectric barrier discharge (DBD) is widely used in plasma medicine, environmental governance and other fields. The common driving source is high voltage pulse power supply. A rectangular pulse power supply based on Marx circuit is designed. The power supply combines the magnetic ring isolation drive scheme with the full-bridge Marx circuit to realize the output of positive, negative and bipolar high voltage rectangular pulses, which solves the limitation that the conventional pulse power supply can only output specific polarity pulses. The operation mode of the circuit is analyzed theoretically and the experimental prototype is built. Under no-load conditions, the pulse polarity can be adjusted and the amplitude of 10 kV high voltage pulse output is realized. The parallel plate dielectric barrier discharge reactor was successfully driven by the pulse power supply, which further verified the feasibility of the scheme.
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图 10 不同极性脉冲下介质阻挡放电电压电流波形
Figure 10. Voltage and current waveforms of dielectric barrier discharge under different polarity pulses
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