Abstract: For the demands of inertial confinement fusion experiments, DT fuel gas and some diagnostic gases such as Ar should be filled into hollow glass microsphere(HGM). However, Ar could not be filled into HGM by means of usual thermal diffusion due to its big atomic size. In this article, neutron radiation was used to create defects in HGM to let Ar enter HGM based on radiation enhancing diffusion. The experimental results show that Ar can be filled into HGM at 500 ℃ and room temperature when the neutron dosage is up to 1×1018 cm-2. The diffusion coefficient after irradiation enhances to Dcav≥3.6×10-13 cm2/s。