微空心阴极放电的3维数值模拟
Three-dimensional numerical simulation of microhollow cathode discharge model
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摘要: 给出了圆筒形微空心阴极的3维流体方程组及其稳态的差分方程和合理的边界条件，并利用计算机模拟计算，得出了He放电形成的粒子密度、电子能量、 电场及电势分布。讨论了在阴极孔径为240~360 mm，气压6 666.1~13 332.2 Pa的范围内放电参量的变化规律:固定电压和气压时，阴极孔径减小，负辉区重合越多；固定阴极孔径和气压时，气压升高，带电粒子密度随着气压增加而增加。结果表明放电参量强烈依赖阴极孔径和气压。Abstract: Three-dimensional fluid equations, steady-state differential equation and reasonable boundary conditions of cylindrical hollow cathode are presented, some parameters have been calculated such as particle density distribution, electron energy and the distribution of electric field. Under the pressure of 6 666.1~13 332.2 Pa and the voltage of 150~300 V discharge, it is found that reducing the dimension of the cathode can enhance the negative glow space, and increasing pressure will enhance the electron density. The simulated results show that the discharge parameters are strongly dependent on voltage and pressure of the microhollow cathode.
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Key words:
- gas discharge /
- microhollow cathode /
- fluid model /
- cathode dark space /
- negative glow space /
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