Abstract: The objective of this work is to investigate the influence of furnace atmosphere properties on the kinetic behaviors of liquid hollow glass microsphere in the fabrication of target by sol-gel technology. The effects of the composition, temperature and pressure of Ar/He gas mixture on the terminal velocity, Reynolds number and Weber number of liquid glass microsphere were studied. Furthermore, the influences of the microsphere diameter and wall thickness on the terminal velocity, Reynolds number and Weber number were also investigated. The results show that the furnace atmosphere composition, temperature and pressure have little influence on the microsphere terminal velocity, but have a great effect on the Reynolds number and Weber number. The microsphere diameter and wall thickness are two