大口径反射镜波前畸变控制技术
Wavefront distortion control for large aperture mirror
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摘要: 依据高功率固体激光装置对大口径反射镜附加波前畸变的严格要求，通过选择适合的结构形式、材料及连接方式和支撑位置设计了大口径反射镜支撑结构，并对其进行了优化分析计算和验证性试验。面形精度试验结果表明：装夹引入的附加波前畸变的峰谷值（PV 值）约为150 nm，小于/3(=632 nm)，结构满足设计指标要求。Abstract: According to the strict requirement for wavefront distortion of large aperture mirror in high power solid-state laser facility, the mirror mount structure was designed by selecting appropriate structure, materials, and location of connections and support. Then its optimization calculation, analysis and confirmatory tests were carried out. Surface accuracy test results show that the peak-valley value of additional wavefront distortion introduced by clamping is about 150 nm, less than /3 (=632 nm). The structure can meet the design requirement.
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Key words:
- large aperture mirror /
- wavefront distortion /
- surface accuracy /
- structure design
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