能动抛光磨盘的有限元法分析
Finite element analysis for active polishing lap
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摘要: 能动磨盘在光学抛光时随磨盘移动位置和旋转角度不同而产生不同的变形以实时与大口径被抛光工件表面实现良好的吻合。模拟了能动磨盘的工作过程，探讨了用于光学抛光的可行性。以加工直径1.5m，f1/2的抛物面光学元件为例，用有限元法对能动磨盘能够产生的变形进行了仿真计算，结果表明能动磨盘能够以较高精度产生旋转对称或非对称的二次曲面。Abstract: In optics polishing process, the active lap can reshape the profile for fitting the surface of large optical component with different local position and rotating angle in real time. In this paper, the working process of active lap is modeled, and the possibility of active lap for optical polishing is also discussed. The deforming capability of the active lap is simulated by finite element method (FEM) to reform a parabolic mirror with diameter 1.5m, f1/2. The results show that the active 1ap enable reshaping fine quadratic curved face symmetrically or dissymmetrically.
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Key words:
- active lap /
- finite element method /
- optical polishing
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