BAW滤波器声-电磁协同仿真中的共地电感效应

高杨; 贾乐; 张大鹏

doi:10.11884/HPLPB201830.180006

BAW滤波器声-电磁协同仿真中的共地电感效应

doi: 10.11884/HPLPB201830.180006

高杨^{1, 3,},
贾乐²,
张大鹏²

1.
中国工程物理研究院电子工程研究所, 四川绵阳 621999
2.
西南科技大学信息工程学院, 四川绵阳 621010
3.
中国科学院高能物理研究所核探测与核电子学国家重点实验室, 北京 100049

基金项目:

国家自然科学基金项目 61574131

核探测与核电子学国家重点实验室开放课题基金项目 2016KF-02

西南科技大学特殊环境机器人技术四川省重点实验室开放基金项目 14ZXTK01

详细信息

作者简介:
高杨(1972—)，男，博士，研究员，从事微电子机械系统研究；gaoyang@caep.cn

中图分类号: TN713.5; TN702
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- 被引次数: 0
出版历程
- 收稿日期: 2018-01-04
- 修回日期: 2018-03-07
- 刊出日期: 2018-06-15

Common ground inductance effect in combined acoustic-electromagnetic simulation of bulk acoustic wave filter

Gao Yang^{1, 3
,},
Jia Le²,
Zhang Dapeng²

1.
Institute of Electronic Engineering, CAEP, P.O.Box 919-512, Mianyang 621999, China
2.
School of Information Engineering, Southwest University of Science and Technology, Mianyang 621010, China
3.
State Key Laboratory of Particle Detection and Electronics, Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China

摘要

摘要: 针对体声波(BAW)滤波器声-电磁协同仿真结果中滤波器的左传输零点向左偏移的现象，验证仿真中共地电感效应的存在并分析其对滤波器性能的影响。通过分别改变BAW滤波器原始布局中的并联薄膜体声波谐振器(FBAR) P1和P4引线到地的位置，即将并联FBAR P1和P4引线到地的路径分别变短后进行声-电磁协同仿真。结果对比表明：声-电磁协同仿真中并联FBAR引线到地与输入、输出端口之间存在共地电感效应。将并联FBAR引线到地的路径变短，滤波器在声-电磁协同仿真中形成的共地电感效应减小，带外抑制性能变好。共地电感效应对于并联FBAR谐振区面积越小的支路影响越大。故在BAW滤波器声-电磁协同仿真中需考虑共地电感效应对滤波器左传输零点和左带外抑制性能的影响。
- BAW滤波器 /
- 声-电磁协同仿真 /
- 电磁耦合 /
- 共地电感
Abstract: Aiming at the phenomenon that left transmission zero of bulk acoustic wave(BAW) filter has a leftward deviation in combined acoustic-electromagnetic simulation, we verified the existence of common inductance effect in simulation and analyzed the influence of common ground inductance on filter performance. We changed positions of parallel thin-film bulk acoustic resonators(FBARs) P1 and P4 to ground in the original layout of the BAW filter(shortening paths to the ground), respectively. Then combined acoustic-electromagnetic simulation of filter was done. The results show that: common ground inductance effect existed between parallel FBAR to ground and input port and output port in combined acoustic-electromagnetic simulation. When the paths of parallel FBARs to ground were shortened, the common ground inductance effect was reduced in combined acoustic-electromagnetic simulation, and out of band rejection was better. The influence of common ground inductance effect on the smaller area parallel FBAR was more obvious. So the influence of common inductance effect on left transmission zero and left out of band rejection should be considered in combined acoustic-electromagnetic simulation of BAW filter.
- bulk acoustic wave filter /
- combined acoustic-electromagnetic simulation /
- electromagnetic coupling /
- common ground inductance effect

HTML全文

图 1 BAW滤波器声-电磁协同仿真模型

Figure 1. Combined acoustic-electromagnetic simulation model of bulk acoustic wave(BAW) filter

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图 2 BAW滤波器声-电磁协同仿真结果

Figure 2. Combined acoustic-electromagnetic simulation results for BAW filter

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图 3 BAW滤波器声-电磁协同仿真中的共地电感效应与文献中的对比图

Figure 3. Comparison between combined acoustic-electromagnetic simulation of BAW filter and literature for common ground inductance effect

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图 4 并联FBAR P1引线到地的位置

Figure 4. Changing of position of parallel film bulk acoustic resonator(FBAR) P1 to ground

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图 5 并联FBAR P1引线到地的位置改变后的仿真结果

Figure 5. Simulation results of changing position of parallel FBAR P1 to ground

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图 6 并联FBAR P4引线到地

Figure 6. Paralleling FBAR P4 to ground

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图 7 并联FBAR P4引线到地的位置改变后的仿真结果

Figure 7. Simulation results of changing position of parallel FBAR P4 to ground

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参考文献(11)

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